Dibujo de diagrama de bolas de proceso lineal

Question

¿Alguien sabe cómo dibujar un diagrama de flujo de proceso simple como este?

Answer 1

Bueno, si realmente quisieras, podrías dibujarlo como un árbol. El contenido de los nodos se toma descaradamente deLa respuesta de R. Schumacher.

Aquí hay un ejemplo usando forest.

\documentclass[tikz,border=5pt]{standalone}
\usepackage{forest}
\usetikzlibrary{arrows.meta}

\begin{document}

  \begin{forest}
    for tree={
      delay={
        label/.wrap pgfmath arg={[font=\sffamily, anchor=west]right:#1}{content()},
        content={},
        circle,
        fill,
        inner sep=1.5pt,
        parent anchor=center,
        child anchor=center
      },
      edge={thick},
      if n children=0{
        l sep+=-15pt,
        append={
          [, edge={thick, -{Triangle[]}}]
        }
      }{}
    }
    [{Ge(100nm)--on--Si substrate}
      [{Hydrogen ion Shower Doping}
        [{Native Oxide Removal (HF:H$_2$O-1:100, 30 sec)}
          [{Ni /TiN (10 nm/10 nm) Deposition}
            [{RTP for germanidation (400$^o$C, 30 sec)}
              [{Post-germanidation Annealing}]]]]]]
  \end{forest}

\end{document}

Answer 2

Esta es una versión cercana de lo que quieres. He modificado el código de¿Cómo se puede crear una línea de tiempo vertical? El único elemento que falta es la flecha inferior (aún estoy pensando en eso)

\documentclass{article}
\usepackage[T1]{fontenc}
\usepackage[utf8]{inputenc}
\usepackage{charter}
\usepackage{environ}
\usepackage{tikz}
\usetikzlibrary{calc,matrix}

% code by Andrew:
% https://tex.stackexchange.com/a/28452/13304
\makeatletter
\let\matamp=&
\catcode`\&=13
\makeatletter
\def&{\iftikz@is@matrix
  \pgfmatrixnextcell
  \else
  \matamp
  \fi}
\makeatother

\newcounter{lines}
\def\endlr{\stepcounter{lines}\\}

\newcounter{vtml}
\setcounter{vtml}{0}

\newif\ifvtimelinetitle
\newif\ifvtimebottomline
\tikzset{description/.style={
  column 2/.append style={#1}
 },
 timeline color/.store in=\vtmlcolor,
 timeline color=red!80!black,
 timeline color st/.style={fill=\vtmlcolor,draw=\vtmlcolor},
 use timeline header/.is if=vtimelinetitle,
 use timeline header=false,
 add bottom line/.is if=vtimebottomline,
 add bottom line=false,
 timeline title/.store in=\vtimelinetitle,
 timeline title={},
 line offset/.store in=\lineoffset,
 line offset=4pt,
}

\NewEnviron{vtimeline}[1][]{%
\setcounter{lines}{1}%
\stepcounter{vtml}%
\begin{tikzpicture}[column 1/.style={anchor=east},
 column 2/.style={anchor=west},
 text depth=0pt,text height=1ex,
 row sep=1ex,
 column sep=1em,
 #1
]
\matrix(vtimeline\thevtml)[matrix of nodes]{\BODY};
\pgfmathtruncatemacro\endmtx{\thelines-1}
\path[timeline color st] 
($(vtimeline\thevtml-1-1.north east)!0.5!(vtimeline\thevtml-1-2.north west)$)--
($(vtimeline\thevtml-\endmtx-1.south east)!0.5!(vtimeline\thevtml-\endmtx-2.south west)$);
\foreach \x in {1,...,\endmtx}{
 \node[circle,timeline color st, inner sep=0.15pt, draw=white, thick] 
 (vtimeline\thevtml-c-\x) at 
 ($(vtimeline\thevtml-\x-1.east)!0.5!(vtimeline\thevtml-\x-2.west)$){};
 \draw[timeline color st](vtimeline\thevtml-c-\x.west)--++(-3pt,0);
 }
 \ifvtimelinetitle%
  \draw[timeline color st]([yshift=\lineoffset]vtimeline\thevtml.north west)--
  ([yshift=\lineoffset]vtimeline\thevtml.north east);
  \node[anchor=west,yshift=16pt,font=\large]
   at (vtimeline\thevtml-1-1.north west) 
%   {\textsc{Timeline \thevtml}: \textit{\vtimelinetitle}};% Original line
   {\textit{\vtimelinetitle}};% Modified Line
 \else%
  \relax%
 \fi%
 \ifvtimebottomline%
   \draw[timeline color st]([yshift=-\lineoffset]vtimeline\thevtml.south west)--
  ([yshift=-\lineoffset]vtimeline\thevtml.south east);
 \else%
   \relax%
 \fi%
\end{tikzpicture}
}

\begin{document}

\begin{vtimeline}[description={text width=10cm}, 
 row sep=2ex, 
 use timeline header,
 timeline title={Simple Process Flow Ball Diagram}]
\quad  & Ge(100nm)--on--Si substrate\endlr
\quad  & Hydrogen ion Shower Doping\endlr
\quad  & Native Oxide Removal (HF:H$_2$O-1:100, 30 sec)\endlr
\quad  & Ni /TiN (10 nm/10 nm) Deposition\endlr
\quad  & RTP for germanidation (400$^o$C, 30 sec)\endlr
\quad  & Post-germanidation Annealing\endlr
\end{vtimeline}

\end{document}